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Rong Chen

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一种用于空间隔离原子层沉积的模块化喷头及装置

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Affilication of Author(s):华中科技大学

School Sign:华中科技大学

Patent Applicant:但威,马玉春,林骥龙,LI YUN,王晓雷,陈蓉,文艳伟,Bin Shan,巴伟明,段晨龙,竹鹏辉

Disigner of the Invention:华中科技大学

Type of Patent:Invent

Authorization number:ZL201710336412.6

Number of Inventors:7

Authorization Date:2019-03-19

First Author:Rong Chen,Rong Chen

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