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Rong Chen

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一种基于空间隔离的纳米颗粒原子层沉积装置及方法

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Affilication of Author(s):华中科技大学

School Sign:华中科技大学

Patent Applicant:巴伟明,文艳伟,Bin Shan,曹坤,褚波,段晨龙,陈蓉

Disigner of the Invention:华中科技大学

Type of Patent:Invent

Authorization number:ZL201610371245.4

Number of Inventors:2

Authorization Date:2016-05-31

First Author:Rong Chen

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