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Rong Chen

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一种用于微纳米颗粒的快速循环原子层沉积设备

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Affilication of Author(s):华中科技大学

School Sign:华中科技大学

Patent Applicant:张晶,曲锴,刘潇,Bin Shan,李嘉伟,陈蓉

Disigner of the Invention:华中科技大学

Type of Patent:Invent

Authorization number:ZL201910095421.X

Number of Inventors:6

Authorization Date:2019-01-31

First Author:Rong Chen

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