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Rong Chen

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一种多元物质原子层沉积薄膜制备方法及装置

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Affilication of Author(s):华中科技大学

School Sign:华中科技大学

Patent Applicant:文艳伟,Bin Shan,高玉乐,何文杰,褚波

Disigner of the Invention:华中科技大学

Type of Patent:Invent

Authorization number:ZL201310636805.0

Number of Inventors:6

Authorization Date:2013-12-02

First Author:陈蓉

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