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Rong Chen

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一种包覆纳米颗粒的原子层沉积装置及其方法

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Affilication of Author(s):华中科技大学

School Sign:华中科技大学

Disigner of the Invention:段晨龙,文艳伟,竹鹏辉,巴伟明,单斌

Type of Patent:Invent

Authorization number:ZL201510946119.2

Number of Inventors:6

Authorization Date:2015-12-17

First Author:Rong Chen

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