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Rong Chen

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基于等离子体原子层沉积的包覆纳米晶薄膜的方法及产品

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Affilication of Author(s):华中科技大学

School Sign:华中科技大学

Patent Applicant:LIU MENG JIA,耿士才,姜晨晨,周彬泽,曹坤,井尧,张晶,李嘉伟,刘潇,Bin Shan,曲锴,陈蓉

Disigner of the Invention:华中科技大学

Type of Patent:Invent

Authorization number:ZL201911003733.X

Number of Inventors:7

Authorization Date:2019-10-22

First Author:Rong Chen

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