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Rong Chen

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一种用于大批量微纳米颗粒包裹的原子层沉积装置

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Affilication of Author(s):华中科技大学

School Sign:华中科技大学

Patent Applicant:张晶,曲锴,刘潇,李嘉伟,陈蓉,Bin Shan,但威,马玉春,王晓雷,何文杰,林骥龙

Disigner of the Invention:华中科技大学

Type of Patent:Invent

Authorization number:ZL201810614143.0

Number of Inventors:6

Authorization Date:2018-06-14

First Author:Rong Chen,Rong Chen

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