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Rong Chen

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一种微纳米颗粒的快速原子层沉积设备

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Affilication of Author(s):华中科技大学

School Sign:华中科技大学

Patent Applicant:曹坤,张晶,李嘉伟,刘潇,曲锴,但威,马玉春,林骥龙,LI YUN,Bin Shan,王晓雷,陈蓉

Disigner of the Invention:华中科技大学

Type of Patent:Invent

Authorization number:ZL201810274604

Number of Inventors:7

Authorization Date:2018-03-30

First Author:Rong Chen

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