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Rong Chen

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一种基于行星流化的粉体原子层沉积系统

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Affilication of Author(s):华中科技大学

School Sign:华中科技大学

Patent Applicant:巴伟明,竹鹏辉,文艳伟,Bin Shan,褚波,段晨龙,何文杰,陈蓉

Disigner of the Invention:华中科技大学

Type of Patent:Invent

Authorization number:ZL201510953058.2

Number of Inventors:6

Authorization Date:2015-12-17

First Author:Rong Chen

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