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Rong Chen

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一种用于气相沉积的装置

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Affilication of Author(s):华中科技大学

School Sign:华中科技大学

Patent Applicant:但威,马玉春,王晓雷,何文杰,林骥龙,文艳伟,Bin Shan,邓章,曹坤,刘潇,段晨龙,陈蓉

Disigner of the Invention:华中科技大学

Type of Patent:Invent

Authorization number:ZL201510923920.5

Number of Inventors:7

Authorization Date:2015-12-15

First Author:Rong Chen

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