Current position: 英文主页 >> Scientific Research >> Patents
Rong Chen

Personal Information

Professor  
Supervisor of Doctorate Candidates  
Supervisor of Master's Candidates  

Patents

一种模块化密封式空间隔离原子层沉积薄膜设备

Hits:

Affilication of Author(s):华中科技大学

School Sign:华中科技大学

Patent Applicant:宋光亮,邓匡举,曹坤,黄奕利,LI YUN,林骥龙,王晓雷,Bin Shan,马玉春,陈蓉

Disigner of the Invention:华中科技大学

Type of Patent:Invent

Authorization number:ZL201911015373.5

Number of Inventors:4

Authorization Date:2019-10-24

First Author:Rong Chen

Pre One:一种柔性器件的超薄复合封装薄膜结构及制备方法

Next One:一种用于制作原子层沉积薄膜的可拆卸喷头及装置