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Rong Chen

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Supervisor of Doctorate Candidates  
Supervisor of Master's Candidates  

Patents

Modular injector and device for spatial separately atomic layer deposition method and reactor

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Affilication of Author(s):华中科技大学

School Sign:华中科技大学

Disigner of the Invention:Rong Chen,Xiaolei Wang,Bin Shan,Yun Li,Jilong Lin,Yuchun Ma,Wei Dan

Type of Patent:PCT or foreign applications

Authorization number:(ZL201710336412.6) US Patent Application: 16/493,208 (Sep 11, 2019) PCT/CN2018/073996

Number of Inventors:7

Authorization Date:2018-01-24

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